Chamber parts are ready for installation upon return.
Residuals such as particulates, ionics, and organics are removed by cleaning the parts to Ultra High Vacuum (UHV) standards, using a variety of techniques such as pressure washing and ultrasonic cleaning in Ultra Pure Water. This ensures that parts are contamination-free and ready for installation into the UHV environment.
Final cleaning to UHV cleanliness standards is conducted in a class 100/1000 cleanroom environment. Parts are given a final Ultrasonic Clean and rinse before being baked dry and outgassed in high-temperature ovens. Parts are then inspected and vacuum-packed.
Specialized packaging materials can be used to guarantee the final cleanliness of the part during transit and storage.
Final cleaning and conditioning techniques deliver enhanced process lifetime to the shields by improving part performance, increasing part cleanliness, and reducing process chamber particle generation. WAM’s cleaning technologies are optimized to deliver increased shield/part lifetime, reducing the cost of your spare inventory.
|
 |
|
Have a question? |
|
|
|
Developing a material for your application?
Need process information about a product?
Our engineers can help.
|
|
|
|
|
